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        Product laser

        Products
        Panel Level TGV Laser Micro-Drilling System
        Product Introduction
        This system integrates a high-precision motion platform and advanced control system with an optimized optical architecture. It is specifically designed to meet the dual demands of precision and throughput for through-glass via (TGV) processing on large-format glass substrates.
        Product Features

        High-precision dynamic tracking platform combined with responsive motion control modules for fast, accurate, and efficient laser modification of glass

        Custom-engineered optical path system tailored for multi-material compatibility and stable, repeatable process performance

        Multiple vision alignment modes adaptable to fiducial marks, external contours, and other positioning strategies

        Proprietary control software developed by DR Laser with bilingual (Chinese/English) interface for enhanced user experience


        Field of application
        Glass-based chip packaging, display chip encapsulation, etc.
        Technical indicators
        Specification
        Details
        Substrate Size
        Up to 650 × 650 mm (downward compatible)
        Loading Method
        Robotic arm / roller feed
        Processing Type
        Laser + high-precision motion platform
        Platform Speed
        ≤ 1400 mm/s
        Hole Shapes
        Circular, square, blind via, through via, micro-groove
        Minimum Hole Diameter
        5 μm
        Platform Accuracy
        Repeatability ≤ 1.5 μm; Positioning Accuracy ≤ ±3 μm
        Pattern Placement Accuracy
        ≤ ±5 μm @ 600 mm; ≤ ±3 μm @ 300 mm
        Throughput
        ≥ 5000 points per second

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